Welcome!

We are proud to present the first real-time monitoring solution for low concentrations of organic AMC (VOC) for the semiconductor industry.

The Challenge

• Real-time Monitoring of Organic AMC for the verification of on-spec production conditions
• Fast on-line detection of Organic AMC spills and excursions with automated alert messaging

The Technology

• Soft Chemical Ionization by Proton Transfer
• Sensitive quantification of VOCs
• On-line detection capability below 1 ppbv
• Response time below 100 ms

The Benefits

• Simultaneous quantification of different organic AMC in real-time
• Configuration to new AMC sets by software upload
• Data transmission to Data server enabled by full LAN-capability