We are proud to present the first real-time monitoring solution for low concentrations of organic AMC (VOC) for the semiconductor industry.
- Real-time Monitoring of Organic AMC for the verification of on-spec production conditions
- Fast on-line detection of Organic AMC spills and excursions with automated alert messaging
- Soft Chemical Ionization by Proton Transfer
- Sensitive quantification of VOCs
- On-line detection capability below 1 ppbv
- Response time below 100 ms
- Simultaneous quantification of different organic AMC in real-time
- Configuration to new AMC sets by software upload
- Data transmission to Data server enabled by full LAN-capability
Parallel Monitoring Capability
Fast Spill Detection
Data Processing Packages
Learn more about the unique features of the AMC-Monitor C-1000...